| Project Overview

Time of Flight Secondary Ion Mass Spectrometry (TOF-SIMS) is an exceptionally sensitive surface analysis technique. It operates by bombarding the sample surface with primary ions, which ejects an extremely small quantity of secondary ions. The mass of these ions is then determined by measuring their different flight times to the detector, depending on their mass. This method provides a measurement technology with extremely high resolution. It can be widely applied in diverse industrial and research fields, including physics, chemistry, microelectronics, biology, pharmaceuticals, and spatial analysis.

TOF-SIMS is capable of providing elemental, molecular, and structural information of surfaces, thin films, interfaces, and even three-dimensional samples. Its distinctive feature lies in the fact that the secondary ions originate from a single atomic or molecular layer of the surface (within 1 nm), thus carrying only surface chemical information. With its advantages of small analytical area, shallow analytical depth, and non-destructive nature, TOF-SIMS is extensively used in physics, chemistry, microelectronics, biology, pharmaceuticals, and spatial analysis across both industrial and research domains.

| Test Objective

(1) When minute foreign substances are present on the product surface and conventional composition analysis methods cannot accurately identify and quantify them, TOF-SIMS can be employed. TOF-SIMS is capable of analyzing the composition of foreign particles with diameters ≥10 μm.

(2) When the surface coating of a product is too thin to allow conventional methods to carry out compositional analysis, TOF-SIMS may be chosen. This technique enables qualitative analysis of the composition of ultra-thin film layers.

(3) When foreign substances appear on the product surface but their type cannot be determined, TOF-SIMS compositional analysis can be applied. It not only identifies the elemental constituents of the foreign matter but also determines the molecular formulas, including organic molecular formulas, of the contaminants.

(4) When issues such as delamination occur between the coating and the substrate cross-section but no obvious traces of foreign matter are observed, TOF-SIMS can be utilized to analyze trace surface substances. This enables determination of whether external contamination exists within the cross-section, with a detection limit as high as the ppm level.

| MTT Advantages

1. Professional Team: A team of highly experienced testing engineers and technical experts.

2. Advanced Equipment: Equipped with internationally leading testing instruments to ensure accuracy and reliability of results.

3. Efficient Service: Rapidly respond to customer needs and provide one-stop, high-efficiency inspection services.

4. Authoritative Certification: The laboratory is certified by ISO/IEC 17025, ensuring that test reports have international credibility.

 Precautions for Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS) Analysis

(1) The maximum sample size is 1 × 1 × 0.5 cm. If the sample exceeds this size, it shall be cut prior to testing.

(2) During sampling, avoid any contact between hands or tools and the test area. After the sample is removed, use vacuum packaging or other packaging that isolates it from the external environment to prevent contamination that could affect analytical results.

(3) Samples for TOF-SIMS testing are not restricted by conductivity; even insulating samples can be tested.

(4) The elemental analysis range of TOF-SIMS extends from H to U, covering both organic and inorganic elements as well as molecular states, with a detection limit at the ppm level.